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MKS Instruments 626A01TDE Pressure Sensor, Range 133.32Pa

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The MKS Instruments 626A01TDE is a high precision vacuum gauge module designed for applications requiring accurate measurement of pressures in the range of 133.32 Pa (1 x 10^-3 Torr), essential for semiconductor manufacturing, research laboratories, and industrial vacuum systems.

Sensor Type:Capacitive

Pressure Range (Pa):133.32

Operating Temperature (°C):-40 to +150

Accuracy (%F.S.):+/-0.1%

Output Signal (V):0.5 to 4.5

Process Connection (mm):1/4 NPT

Electrical Connection:2-wire

    The MKS Instruments 626A01TDE is engineered for exceptional accuracy and reliability, making it an indispensable tool for precision vacuum measurements. It is built with robust materials including stainless steel and high-quality glass, ensuring durability in harsh industrial environments.

    Featuring a quick response time of less than one second, this gauge ensures that any changes in pressure are detected and reported immediately, critical for maintaining process integrity in semiconductor fabrication and other precision industries.

    Operating within a temperature range from -20°C to +55°C, the MKS Instruments 626A01TDE is designed to withstand varied environmental conditions, offering versatility across multiple applications.

    With its power consumption of less than 5 mA at 5 VDC, the module is energy-efficient, reducing operational costs and ensuring compatibility with a wide range of power supplies.

    Equipped with connectivity options including RS232, USB, and analog output, the MKS Instruments 626A01TDE offers flexibility in data transmission and interface integration, making it easily compatible with existing systems and equipment.

MKS 626A01TDE RANGE 133.32Pa




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