Manufacturer:Lam Research
Model Number:810-069751-114
Module Type:Precision Module
Application:Semiconductor Processing
Voltage Rating:24V DC
Current Rating:1A
Frequency Range:Up to 50 kHz
Temperature Range:-20°C to +85°C
Environmental Rating:IP67
Certifications:CE, UL
The Lam Research 810-069751-114 Plasma Etch Module is engineered for precision etching in semiconductor fabrication.
With its state-of-the-art design, this module ensures consistent and reliable etching results across a wide range of materials.
Its advanced control interface and communication protocols make it easy to integrate into existing manufacturing systems.
The module’s chuck temperature range allows for precise control over the process environment, ensuring optimal results for each application.
Certified to meet industry standards, this module is a trusted choice for semiconductor manufacturers seeking high-performance plasma etching solutions.
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