Manufacturer:KLA Corporation
Model:KLA 5105
Module Type:High Precision Measurement
Measurement Range:± 0.01 nm
Resolution:0.001 nm
Accuracy:± 0.005 nm
Repeatability:± 0.002 nm
Operating Voltage:24 VDC ± 10%
Operating Temperature Range:-20°C to +60°C
Weight:2.5 kg
Dimensions:30 cm x 20 cm x 10 cm
The KLA KLA 5105 Advanced Inspection Module is a cutting-edge solution for semiconductor wafer inspection. Designed for precision and reliability, this module offers sub-50nm defect detection capabilities essential for modern semiconductor manufacturing. With high-resolution imaging, it ensures that even the smallest defects are identified and corrected, enhancing overall wafer quality. The integrated inspection software suite provides a comprehensive analysis platform, allowing technicians to monitor and optimize the inspection process efficiently. Operating at up to 200 wafers per hour, the KLA 5105 is built to handle high-volume production environments. Its robust design, weighing approximately 500kg, is built to withstand the rigorous demands of continuous operation. The KLA 5105 operates within a specific environmental range, requiring 220V AC power and ensuring stable performance under controlled conditions. Ideal for semiconductor fabrication facilities, this module is a vital tool for maintaining high standards of quality and efficiency.
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